%J at - Automatisierungstechnik %P 794-802 %A Matthias Kowal %A Christian Prehofer %A Ina Schaefer %A Mirco Tribastone %X Manufacturing systems and their control software exhibit a large number of variants, which evolve over time in order to meet changing functional and non-functional requirements. To handle the resulting complexity, we propose a multi-perspective modeling approach with different viewpoints regarding workflow, architecture and component behavior. We combine it with delta modeling to seamlessly capture variability and evolution by the same means on each of the viewpoints. We show how the separation in different viewpoints enables early performance analysis as well as code generation. The approach is illustrated using a case study. %L eprints2961 %I De Gruyter %N 11 %T Model-based Development and Performance Analysis for Evolving Manufacturing Systems %V 62 %R 10.1515/auto-2014-1098 %K Model-driven Development; Variability; Evolution; Performance Analyses %D 2014